Page 67 - MEMS Mechanical Sensors

56 MEMS Simulation and Design Tools

Cadence
MemsModeler (ROM)
Composer
Spectre
MEMS
Master
CIF
APDL ANSYS
Multiphysics
Cadence Foundry process
Virtuoso description

ANSYS to layout
CIF/GDSII
Foundry
Figure 3.16 MEMS Xplorer Architecture.

References

[1] http://www.matlab.com.
[2] Mokhtari, M., et al., “Analysis of Parasitic Effects in the Performance of Closed Loop
Micromachined Inertial Sensors with Higher Order SD-Modulators,” Proc. Micromechan-
ics Europe (MME), Sinaia, Romania, October 2002, pp. 173–176.
[3] Gaura, E., and M., Kraft, “Noise Considerations for Closed Loop Digital Accelerometers,”
Proc. 5th Conf. on Modeling and Simulation of Microsystems, San Juan, Puerto Rico, April
2002, pp. 154–157.
[4] Marco, S., et al., “Analysis of Electrostatic Damped Piezoresistive Silicon Accelerometer,”
Sensors and Actuators, Vol. A37–38, 1993, pp. 317–322.
[5] Veijola, T., and T. Ryhaenen, “Equivalent Circuit Model of the Squeezed Gas Film in a Sili-
con Accelerometer,” Sensors and Actuators, Vol. A48, 1995, pp. 239–248.
[6] Lewis, C. P., and M. Kraft, “Simulation of a Micromachined Digital Accelerometer in
SIMULINK and PSPICE,” UKACC Int. Conf. on Control, Vol. 1, 1996, pp. 205–209.
[7] http://www.vissim.com.
[8] http://www.analogy.com/products/mixedsignal/saber/saber.html.
[9] http://www.coventor.com.
[10] http://www.corningintellisense.com.
[11] http://www.ansys.com/ansys/mems/index.htm.
[12] Beeby, S. P., J. N. Ross, and N. M. White, “Design and Fabrication of a Micromachined Sili-
con Accelerometer with Thick-Film Printed PZT Sensors,” J. Micromech. Microeng., Vol.
10, No. 3, 2000, pp. 322–329.
[13] Beeby, S. P., M. Stuttle, and N. M. White, “Design and Fabrication of a Low-Cost Microen-
gineered Silicon Pressure Sensor with Linearized Output,” IEE Proc. Sci. Meas. Technol.,
Vol. 147, No. 3, 2000, pp. 127–130.