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Osiander / MEMS and microstructures in Aerospace applications  DK3181_c007 Final Proof page 137 1.9.2005 12:04pm




                    Microtechnologies for Science Instrumentation Applications      137


















                    FIGURE 7.8 Scanning electron microscope image of the front (A) and back (B) side of the
                    JWST microshutter array (Source: NASA GSFC.)





































                    FIGURE 7.9 Optical transmission image of a pattern written with the microshutter array
                    (Source: NASA GSFC.)




                    device is scheduled to be delivered for instrument integration in 2007, with a
                    projected launch date in 2009. As a risk mitigation path, a macroscopic slit array
                    is fabricated in parallel. 42




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