Page 148 - MEMS and Microstructures in Aerospace Applications
P. 148
Osiander / MEMS and microstructures in Aerospace applications DK3181_c007 Final Proof page 137 1.9.2005 12:04pm
Microtechnologies for Science Instrumentation Applications 137
FIGURE 7.8 Scanning electron microscope image of the front (A) and back (B) side of the
JWST microshutter array (Source: NASA GSFC.)
FIGURE 7.9 Optical transmission image of a pattern written with the microshutter array
(Source: NASA GSFC.)
device is scheduled to be delivered for instrument integration in 2007, with a
projected launch date in 2009. As a risk mitigation path, a macroscopic slit array
is fabricated in parallel. 42
© 2006 by Taylor & Francis Group, LLC