Page 155 - MEMS and Microstructures in Aerospace Applications
P. 155
Osiander / MEMS and microstructures in Aerospace applications DK3181_c007 Final Proof page 144 1.9.2005 12:04pm
144 MEMS and Microstructures in Aerospace Applications
19. Hill, E.W. et al., Giant magnetoresistive magnetometer, Sensors and Actuators A:
Physical 59 (1–3), 30, 1997.
20. Yee, J.K., Yang, H.H., and Judy, J.W., Dynamic response and shock resistance of
ferromagnetic micromechanical magnetometers, Proceedings of the 15th IEEE Inter-
national Conference on Micro Electro Mechanical Systems (MEMS) 308, 2002.
21. Latorre, L. et al., Micromachined CMOS magnetic field sensor with ferromagnetic
actuation, Proceedings of SPIE 4019, 398, 2000.
22. Beroulle, V. et al., Micromachined CMOS magnetic field sensors with low-noise signal
conditioning, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
2002, 256, 2002.
23. Kistenmacher, T.J. et al., Design and properties of a thin-film, MEMS-based magneto-
strictive magnetometer, Materials Research Society Symposium — Proceedings 444, 75,
1997.
24. Givens, R.B. et al., High sensitivity, wide dynamic range magnetometer designed on a
xylophone resonator, Applied Physics Letters 69 (18), 2755, 1996.
25. Vasquez, D.J. and Judy, J.W., Zero-power magnetometers with remote optical interro-
gation, Proceedings of the 17th IEEE International Conference on Micro Electro
Mechanical Systems (MEMS) 109, 2004.
26. Miller, L.M. et al., M-magnetometer based on electron tunneling, Proceedings of the 9th
IEEE Micro Electro Mechanical Systems (MEMS) Workshop 467, 1996.
27. Tejada, F. et al., Surface micromachining in silicon on sapphire CMOS
technology, Proceedings — IEEE International Symposium on Circuits and Systems 4,
2004.
28. Givens, R.B. et al., Heterodyne detection of alternating magnetic fields with a resonating
xylophone bar magnetometer, Applied Physics Letters 74 (10), 1472, 1999.
29. Mott, D.B. et al., Micromachined tunable Fabry–Perot filters for infrared astronomy,
Proceedings of SPIE 4841, 578, 2002.
30. Sinclair, M.B. et al., A MEMS-based correlation radiometer, Proceedings of SPIE 5346,
37, 2004.
31. Li, M.J. et al., Fabrication of microshutter arrays for space application, Proceedings of
SPIE 4407, 295, 2001.
32. Moseley, S.H. et al., Programmable 2-dimensional microshutter arrays, Proceedings of
SPIE 3878, 392, 1999.
33. Mott, D.B. et al., Magnetically actuated microshutter arrays, Proceedings of SPIE 4561,
163, 2001.
34. Zheng, Y. et al., Microshutter arrays for near-infrared applications on the James Webb
space telescope, Proceedings of SPIE 4981, 113, 2003.
35. Tralshawala, N. et al., Design and fabrication of superconducting transition edge x-ray
calorimeters, Proceedings 8th International Workshop on Low Temperature Detectors
444, 188, 2000.
36. Connelly, J.A. et al., Alignment and performance of the infrared multi-object spectrom-
eter, Proceedings of SPIE 5172, 1, 2003.
37. MacKenty, J.W. et al., IRMOS: an infrared multi-object spectrometer using a MEMS
micro-mirror array, Proceedings of SPIE 4841, 953, 2002.
38. Winsor, R. et al., Optical design for an infrared multi-object spectrometer (irmos),
Proceedings of SPIE 4092, 102, 2000.
© 2006 by Taylor & Francis Group, LLC