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20 MEMS and Microstructures in Aerospace Applications
50 µm
FIGURE 2.4 Individual shuttle element of the JWST shuttle array. (Source: NASA).
FIGURE 2.5 Ability to address or actuate and provide the required contrast demonstrated
on a fully functional 128 by 64 pixel module of the MEMS microshutter array. (Source:
NASA.)
2.2.3 INCHWORM MICROACTUATORS
The NASA Jet Propulsion Laboratory (JPL) is currently developing an innovative
4
inchworm microactuator for the purpose of ultraprecision positioning of the mirror
segments of a proposed Advanced Segmented Silicon Space Telescope (ASSiST).
This particular activity is one of many diverse MEMS or NEMS technology
developments for space mission applications being pursued at NASA/JPL. 5
© 2006 by Taylor & Francis Group, LLC
