Page 33 - MEMS and Microstructures in Aerospace Applications

Osiander / MEMS and microstructures in Aerospace applications DK3181_c002 Final Proof page 24 1.9.2005 11:49am

24 MEMS and Microstructures in Aerospace Applications

FIGURE 2.8 A prototype MEMS microthruster hardware fabricated in GSFC’s detector
development laboratory (DDL). (Source: NASA.)

. MEMS Stirling coolers
. MEMS liquid–metal microswitches
. MEMS inertial sensors
. MEMS microwave RF switches and phase shifters
. MEMS thrusters
. MEMS deformable mirrors
. MEMS pressure or temperature sensors
. MEMS power supplies.

To sum up this section, it should be stressed that the few selected developments
highlighted above are not intended to represent a comprehensive list 12,13 of recent
or ongoing space MEMS technology developments. In fact, there are a number of
other very noteworthy space MEMS technology projects in various stages of
developments. Among these are:

. Flat plasma spectrometer 14 for space plasma and ionospheric–thermospheric
scientific investigations
. Miniature mass spectrometer 3,14 for planetary surface chemistry investigations
. Switch-reconfigurable antenna array element 15 for space-based radar
applications

© 2006 by Taylor & Francis Group, LLC