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Osiander / MEMS and microstructures in Aerospace applications DK3181_c016 Final Proof page 347 1.9.2005 12:56pm
16 Assurance Practices for
Microelectromechanical
Systems and
Microstructures in
Aerospace
M. Ann Garrison Darrin and Dawnielle Farrar
CONTENTS
16.1 Introduction................................................................................................ 348
16.1.1 Commercial vs. Space Environment............................................ 348
16.1.2 Tailoring of Test Plans................................................................. 349
16.2 Design Practices for the Space Environment............................................ 350
16.2.1 Life Cycle Environment Profile................................................... 350
16.2.2 De-Rating and Redundancy.......................................................... 351
16.3 Screening, Qualification, and Process Controls........................................ 352
16.3.1 Design through Fabrication.......................................................... 352
16.3.2 Assembly and Packaging Qualification/Screening
Requirements ................................................................................ 353
16.3.2.1 MIL-PRF-38535 Integrated Circuits
(Microcircuits) Manufacturing, General
Specification................................................................. 353
16.3.2.2 MIL-STD-883 Test Method Standard,
Microcircuits ................................................................ 353
16.3.3 Packaging and Handling............................................................... 356
16.4 Reviews...................................................................................................... 358
16.5 Environmental Test.................................................................................... 360
16.5.1 Sample Environmental Component Test Requirements.............. 360
16.5.1.1 Test Tolerances............................................................ 361
16.5.1.2 Test Documentation..................................................... 361
16.5.1.3 Test Methodology........................................................ 363
16.5.1.4 Protoflight Testing ....................................................... 364
16.5.1.5 Acceptance Testing...................................................... 364
16.5.1.6 Comprehensive Performance Testing.......................... 365
16.5.1.7 Limited Performance Testing...................................... 365
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© 2006 by Taylor & Francis Group, LLC