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Materials for Microelectromechanical Systems 2-13

(a)

(b)

(c)

(d)

(e)

Oxide LTO Poly Si

FIGURE 2.4 Cross-sectional schematics of the rapid prototyping process used to fabricate polysilicon micromotors
by surface micromachining: (a) after the rotor–stator etch, (b) after the flange mold etch, (c) after the bearing clear-
ance oxidation step, (d) after the bearing etch, and (e) after the release step.

FIGURE 2.5 SEM micrograph of a polysilicon micromotor fabricated using the rapid prototyping process.

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