Page 271 - Mechanics of Microelectromechanical Systems
P. 271
258 Chapter 4
Answer:
The bloc force of the two-beam thermal actuator is up to 80 times larger
than the bloc force of a bent beam actuator, for very small lengths of the
short leg of the two-beam design.
Problem 4.5
A transverse (plate-type) electrostatic device is used as a capacitive
sensor. Design the sensor such that when the mobile plate travels between the
limit positions and the capacitance variation is no
less than a minimum value
Answer:
the area Can be chosen arbitrarily;
Problem 4.6
Design a longitudinal (comb-type) electrostatic actuator of given
sensitivity that is expected to deliver an output force F.
Answer:
Problem 4.7
A rotary electrostatic actuator with a single gap produces a
maximum torque which is 1.5 times less than the desired effective value
By keeping the existing gap, other conjugate pairs are added radially in
order to meet the objective. Find the number of total gaps (radial digit pairs)
that will enable achieving the level of torque needed when
Answer:
n = 2
Problem 4.8
A microcantilever of given dimensions and
is used as an electrostatic actuator. Find the gap between the
microcantilever and its mating pad (assuming both have the same length) that
will produce a tip deflection of under application of a 80 V voltage.
The material properties are E = 120 GPa and
Answer:
