Page 274 - Mechanics of Microelectromechanical Systems
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4. Microtransduction: actuation and sensing 261
Problem 4.15
A bimorph is constructed of two different materials, having
Find the
thicknesses when and The tip slope is
produced by a temperature increase of
Answer:
Problem 4.16
A bimorph is formed of two layers, the active one being piezomagnetic
and the substrate being polysilicon. Find the length of the bimorph when a tip
bloc force of needs to be produced with an induced strain
Known are
Answer:
Problem 4.17
A bimorph sensor is formed of a piezoelectric layer attached to a
structural polysilicon layer of given thickness Determine the variation
in the external field when a tip deflection of is measured optically.
The following parameters are known:
Answer:
Problem 4.18
A bimorph with dissimilar-length components utilizes thermal expansion
for temperature change detection. Find the temperature variation when a
tip deflection of is measured experimentally. Known are the
following amounts:
Answer:
Problem 4.19
A three-layer multimorph is constructed to function as a thermal actuator.
Determine the tip deflection that this actuator is capable of producing under a
temperature increase of It is known that
