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74                                                          Chapter 2
         Figure 2.5 is the plot of this error function in terms of the tip deflection
         and slope   when                     and                  It can be
         seen that the errors can be as high as 75% for large tip deflections and small
         slopes.

         2.2.2   Constant Rectangular Cross-Section Design

             The  absolute values of  the  stiffnesses that  define the out-of-the-plane
         bending about the  sensitive  axis  (the  y-axis  in  Fig. 2.3)  have been given  in
         Chapter 1  and are written here as:











         Similarly, the magnitudes of the stiffnesses that define the bending about the
         z-axis are:











          The axial  stiffness is:





          The torsion  stiffness in the case where the thickness is considerably smaller
          than the width (t << w) is:






          Example 2.2
             Compare the stiffnesses that characterize  the bending  about the sensitive
          axis  (the  y-axis) to the  other  pertinent  stiffnesses of a constant rectangular
          cross-section microcantilever.


          Solution:
              The length  l and width w of a microcantilever are expressed in terms of
          the thickness t as:
   82   83   84   85   86   87   88   89   90   91   92