Page 91 - Mechanics of Microelectromechanical Systems

78 Chapter 2
where h is the distance measured about the z-direction between the
microcantilever and the xy detection plane.
Figure 2.9 indicates the in-plane position of the attached mass. The
torsion moment produced by the added mass is:

such that the tip torsion angle is:

Figure 2.8 Experimental system for in-plane mass detection

Figure 2.9 In-plane position of added mass