Page 94 - Mechanics of Microelectromechanical Systems
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2. Microcantilevers, microhinges, microbridges 81
By equating the first Eq. (2.47) to Eq. (2.48) results in:
which indicates that by approximating the force according to this
equation will always result in either an overestimation, when acts in
unison with or in an underestimation, when is directed in the opposite
direction. Assuming that the force can be expressed as a fraction of the
real namely:
the apparent force of Eq. (2.49) can be written as:
The relative error between the force calculated by Eq. (2.51) and the real
force is:
and Fig. 2.11 is a plot giving the relative errors for the case where c = 0.5.
Figure 2.11 Errors between the real force and the apparent one in AFM measurements