Page 94 - Mechanics of Microelectromechanical Systems
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2. Microcantilevers, microhinges, microbridges                    81




         By equating the first Eq. (2.47) to Eq. (2.48) results in:






         which indicates that  by approximating  the  force  according to  this
         equation will  always result in either an overestimation,  when   acts in
         unison with    or in an underestimation, when  is  directed in the opposite
         direction.  Assuming that the  force  can  be  expressed as  a  fraction of the
         real    namely:





         the apparent force of Eq. (2.49) can be written as:





          The relative  error  between the  force calculated by Eq.  (2.51) and  the  real
          force is:





          and Fig. 2.11 is a plot giving the relative errors for the case where c = 0.5.
























            Figure 2.11  Errors between the real force and the apparent one in AFM measurements
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