Page 97 - Mechanics of Microelectromechanical Systems
P. 97

84                                                          Chapter 2















         The axial stiffness and torsional stiffness are:









          For the  particular  condition  where        the trapezoid becomes a
         rectangle, and  consequently  by taking the limit        in  Eqs. (2.58)
          through  (2.65), the  stiffness  equations for  a  constant,  rectangular  cross-
          section  cantilever –  Eqs. (2.27), (2.28),  (2.29) and (2.30)  –  should be
          retrieved, which indeed occurs, as it can easily e checked.

          Example 2.7
             Compare a constant cross-section, rectangular microcantilever to one of
          trapezoid  configuration,  which has  the  same  length and       by
          analyzing the     and       stiffnesses. Consider that         and c
          spans the  [1, 5]  range.  Also  consider that the microcantilever’s cross-section
          is very thin (t << w).

          Solution:
             The following stiffness ratios can be formulated:








          where the  *  superscript indicates the  constant rectangular cross-section
          microcantilever. By  utilizing Eqs.  (2.27), (2.30), (2.58) and  (2.65), together
          with the given width relationship, Eqs. (2.66) transform into:
   92   93   94   95   96   97   98   99   100   101   102