Page 102 - Mechanics of Microelectromechanical Systems
P. 102
2. Microcantilevers, microhinges, microbridges 89
Figure 2.15 Geometry of a right elliptically-filleted microcantilever
and the corresponding stiffnesses can be found by inverting the compliance
submatrix of Eq. (2.6).
The compliances characterizing the bending about the z-axis are:
The axial compliance is:
