Page 107 - Mechanics of Microelectromechanical Systems
P. 107
94 Chapter 2
where the axial compliance is:
Equation (2.98) indicates that, being composed of two bars in parallel, the
axial compliance of the hollow rectangular microcantilever is half the axial
compliance of one component.
2.3.2 Triangular Design
A triangular hollow microcantilever is now analyzed according to the
geometry shown in Fig. 2.19 (a). The out-of-the plane compliances only will
be derived here, as they are the ones of main importance. The conclusions
drawn with respect to the compliances of microstructures that are formed as
parallel combinations of identical components can also be applied here, as
the two inclined legs are identical and are coupled in parallel. It will
therefore suffice finding the compliances of one leg as sketched in Fig. 2.19
(b).
Figure 2.19 Hollow triangular microcantilever: (a) full model; (b) half model
The calculation procedure follows the one detailed previously, and therefore
application of the loads and will produce the elastic
deformations and The deformations and loads are formally
connected as:
