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2. Microcantilevers, microhinges, microbridges 95
where the components of the symmetric matrix are:
As Eq. (2.99) indicates it, bending and torsional are coupled this time, unlike
the case of the hollow rectangular design.
2.3.3 Trapezoid Design
Figure 2.20 (a) is the simplified model of a hollow trapezoid
microcantilever’s. The stiffnesses which are of interest are found in a similar
fashion to the ones determined for the triangular configuration. The coupler
2-4 is considered rigid.
Figure 2.20 Hollow trapezoid microcantilever: (a) full model; (b) half model
