Page 106 - Mechanics of Microelectromechanical Systems
P. 106
2. Microcantilevers, microhinges, microbridges 93
with:
Equations (2.92) indicate that the compliances of the hollow rectangular
design are half the ones corresponding to a single cantilever of length 1. The
two segments, 1-2 and 4-5, are actually combined in parallel by means of the
rigid coupler 2-4, and therefore the compliances of the parallel combination
are always half the compliances of one single member. The moment
produces a torsion angle, according to:
where the torsion stiffness is:
The in-plane compliances can be determined by applying two forces,
and and a moment (none of them are shown in Fig. 2.18). By
applying the same procedure as above, the in-plane displacements and loads
that correspond to bending and axial loading are related as:
where:
The axial load and deformation are decoupled from bending and they are
related by the equation:
