Page 109 - Mechanics of Microelectromechanical Systems
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96 Chapter 2
By applying a procedure similar to the one used to find the out-of-the-
plane compliances for half the triangular microcantilever, the displacements
at the mid-point 3 in Fig. 2.20 (b) can be expressed as:
The compliances of Eq. (2.106) are:
Example 2.10
A rectangular microcantilever and a triangular one, both hollow, provide
identical tip experimental data for and Assuming the two designs have
identical geometries and material properties, determine the force which is
sensed by each configuration. Consider the following numerical values:
E= 130 GPa, G = 0.8
E.
Solution:
The force detected by a hollow rectangular microcantilever is calculated
by means of Eqs. (2.91) and (2.92) which enable solving for the unknowns
and The tip force is
