Page 114 - Mechanics of Microelectromechanical Systems
P. 114
2. Microcantilevers, microhinges, microbridges 101
The torsional stiffness for the case where t<<w is:
The axial stiffness is:
3.2.2 Right Circular Microhinge
The variable width of the right circular microhinge with the dimensions
indicated in Fig. 2.25 (a) is:
The stiffnesses that define bending about the sensitive axis (the y-axis) are:
where the function A is:
The torsion-related stiffness is:
The axial stiffness is: