Page 100 - Mechanics of Microelectromechanical Systems
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2. Microcantilevers, microhinges, microbridges 87
The eight compliances that characterize the elastic behavior of this design
can be calculated according to their definitions, as defined in Eqs. (2.8)
through (2.12), by using the variable width of Eq. (2.71). The bending about
the sensitive axis (the y-axis, which is contained in the plane of the figure) is
defined by the following compliances, which are calculated based on their
definition of Eqs. (2.8) through (2.10):
Figure 2.14 Geometry of a right circularly-filleted microcantilever
The corresponding stiffnesses, and can be determined
through inversion of the compliance matrix, which comprises, according to
Eq. (2.6), the individual compliances of Eqs. (2.72), (2.73) and (2.74). The
compliances that are connected to bending about the z-axis can similarly be
calculated and they are:
