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2. Microcantilevers, microhinges, microbridges 83
2.2.3 Solid Trapezoid Design
The geometry of a trapezoid microcantilever is sketched in Fig. 2.12.
Figure 2.12 Geometry of solid trapezoid microcantilever
The variable width depends linearly on the abscissa x, namely:
By utilizing this equation in the generic compliance formulation, the
stiffnesses of a solid trapezoidal microcantilever can be computed by
inverting the compliance submatrices or terms. The bending-related
stiffnesses corresponding to the sensitive axis are:
The stiffnesses that describe bending about the other bending axis (the z-
axis) are:
