Page 83 - Mechanics of Microelectromechanical Systems
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70 Chapter 2
The compliance terms of Eqs. (2.6) and (2.7) have been calculated in Chapter
1 for a constant cross-section straight member. In the case of a variable
cross-section member, the compliances of Eq. (2.6) are calculated (see
Lobontiu [7] for instance) as:
The compliances of Eq. (2.7) are found by switching the subscripts y and z in
Eqs. (2.8) through (2.10).
The axial-related compliance of Eq. (2.5) is calculated as:
whereas the torsional compliance of Eq. (2.5) is:
The variable rectangular cross-section amounts in the equations above are:
The equations for the torsion moment of inertia are similar to Eqs. (1.118)
and (1.119) that correspond to a constant rectangular cross-section. All cross-