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1.3 Miniaturized Systems with Microoptics and Micromechanics 15
Mirror

Mirror post
Torsion hinge Stopper
Electrode

Yoke

Bias/reset

To SRAM
Fig. 1.16. Digital micromirror device (DMD)developed by Texas Instruments.
A DMD structure, with a mirror connected to a yoke by two torsion hinges, is
fabricated by a CMOS-like process [1.5] Courtesy of Larry J. Hornbeck, Texas In-
struments, USA c 1993 IEEE

(a) (d)
Hinge support post Yoke Hinge
Metal Sacrificed layer CMP oxide

Substrate

(b) (e) Mirror Mirror support post Mirror mask
Hinge mask Hinge metal

(c) (f) Mirror Mirror support post
Yoke mask Yoke metal
Hinge Yoke

Fig. 1.17. Fabrication process of a digital mirror device (DMD)structure consisting
of a mirror connected by two torsion hinges [1.5] c 1998 IEEE