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34 ELECTRONIC MATERIALS AND PROCESSING
REFERENCES
Fung C. D., Cheung P. W., Ko W. H. and Fleming D. C, eds. (1985). Micromachining and
Micropackaging of Transducers, Elsevier, Amsterdam, The Netherlands.
Sze S. M. (1985). Semiconductor Devices: Physics and Technology, Wiley & Sons, New York.
Sze S. M. (1988). VLSI Technology, McGraw-Hill, New York.
