Page 191 - Semiconductor For Micro- and Nanotechnology An Introduction For Engineers
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Statistics
                             doping with total donor concentration N
                                                             D
                                                                    N
                                                                n +
                             tion N  . In this case (5.44) turns into n = , and zero acceptor concentra-
                                                                        .
                                  A                          e   h    D +
                             In order to calculate N   we must know the fraction of electron occupy-
                                               D  +
                             ing the donor levels, which is given by
                                                         N D
                                              n  =  -----------------------------------------  (5.45)
                                               D          E –  µ
                                                            D
                                                   1 +  exp  ---------------- 
                                                           k T 
                                                            B
                             (5.45) is calculated by applying integration in energy space of a Fermi-
                             Dirac distribution (5.36) inside the band-gap. Usually there are no energy
                             levels present. Due to doping we obtain at  E   a density of states given
                                                                 D
                                        (
                             by  DE() =  δ E –  E )  , where the delta function accounts for the fact
                                              D
                             that only the energy level  E   in the band-gap can be occupied. This
                                                     D
                             gives N  + =  N –  n  .
                                   D     D    D
                             We are left with the task to calculate  n  . We do not know the chemical
                                                             h
                             potential, but we know from (5.39a) and (5.39b) that, wherever it comes
                             to lie
                                                           – E G   2
                                           n n =  D D exp  ---------- =  n i     (5.46)
                                                           k T 
                                                   C
                                                     V
                                            e h
                                                            B
                                                   2
                             holds. Thus we use n =  n ⁄  n   and obtain a second order equation for
                                              h    i  e
                             n   reading
                              e
                                                2
                                                           2
                                               n –  n N D + –  n =  0             (5.47)
                                                    e
                                                           i
                                                e
                             Assuming that at the given temperature all donor atoms are ionized
                             N  =  N   we obtain
                              D     D +
                                                  N         4n 
                                                                2
                                                                i
                                                    D
                                                     
                                             n =  ------- 1 +  1 +  --------     (5.48)
                                              e
                                                   2         N 
                                                               2
                                                               D
                             The value in (5.48) must equal that in (5.39a). This gives us the chemical
                             potential
                188          Semiconductors for Micro and Nanosystem Technology
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