Page 25 - Semiconductor For Micro- and Nanotechnology An Introduction For Engineers

Introduction
1.3 Sources of Information
We encourage every student to regularly consult the published literature,
and in particular the following journals:

IOP • Journal of Micromechanics and Microengineering
• Journal of Nanotechnology

IEEE • Journal of Microelectromechanical Systems

• Journal of Electron Devices
• Journal of Sensors
• Journal of Nanosystems

Other • Wiley-VCH Sensors Update, a journal of review articles

• MYU Journal of Sensors and Materials
• Elsevier Journal of Sensors and Actuators
• Springer Verlag Journal of Microsystem Technology

• Physical Review
• Journal of Applied Physics

Of course there are more sources than the list above, but it is truly impos-
sible to list everything relevant. Additional sources on the world-wide-
web are blossoming (see e.g. [1.5]), as well as the emergence of standard
texts on technology, applications and theory. A starting point is best taken
from the lists of chapter references. Two useful textbook references are
Sze’s book on the physics of semiconductor devices [1.6] and Middel-
hoek’s book on silicon sensors [1.7].

1.4 Summary for Chapter 1

Silicon is a very important technological material, and understanding its
behavior is a key to participating in the largest industry ever created. To

24 Semiconductors for Micro and Nanosystem Technology