Page 26 - Semiconductor For Micro- and Nanotechnology An Introduction For Engineers

References for Chapter 1
understand the workings of the semiconductor silicon, it helps to
approach it as a system of interacting subsystems.
The subsystems comprise the crystal lattice and its quantized vibra-
tions—the phonons, electromagnetic radiation and its quantized form—
the photons, and the loosely bound quantized charges—the electrons.
The interactions between these systems is a good model with which to
understand most of the technologically useful behavior of silicon. To
understand the ensuing topics, we require a background in particle statis-
tics. To render the ideas useful for exploitation in devices such as diodes,
transistors, sensors and actuators, we require an understanding of particle
transport modelling.

These topics are now considered in more detail in the six remaining
chapters of the book.

1.5 References for Chapter 1

1.1 Prof. Dr. Henry Baltes, Private communication
1.2 Prof. Dr. Christofer Hierold, Private communication.
1.3 See e.g. http://www.dlp.com
1.4 D. Lange, T. Akiyama, C. Hagleitner, A. Tonin, H. R. Hidber, P.
Niedermann, U. Staufer, N. F. de Rooij, O. Brand, and H. Baltes,
Parallel Scanning AFM with On-Chip Circuitry in CMOS Technol-
ogy, Proc. IEEE MEMS, Orlando, Florida (1999) 447-452
1.5 See e.g. http://www.memsnet.org/
1.6 S. M. Sze, Physics of Semiconductor Devices, 2nd Ed., John Wiley
and Sons, New York (1981)
1.7 Simon Middelhoek and S. A. Audet, Silicon Sensors, Academic
Press, London (1989)

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