Page 327 - Semiconductor For Micro- and Nanotechnology An Introduction For Engineers

Interacting Subsystems
r 0
-----------------------
N D = aqε ε A 2 (7.193)
2
In other words, we can use Schottky diodes as a technique with which to
characterize doping profiles, but can only expect good results for uniform
doping at levels where a reasonable space-charge capacitor forms.

7.7 Summary for Chapter 7

In this chapter we have taken a closer look at the interactions that arise
when the three particle systems, phonons, electrons, and photons interact
with each other. The phenomena, or constitutive equations, described
include heat conductivity, dielectric permittivity, piezoresistivity, the
thermoelectric effects, and many more. It was shown that the in-homoge-
neity of a crystal can also lead to useful effects, for example the PN junc-
tion and surface acoustic waveguides. Most effects described in this
chapter have lead to useful microelectronic devices, including solid state
sensors, actuators, lasers and transistors. Most of these devices can be
built using silicon technology.

7.8 References for Chapter 7

7.1 D. F. Nelson, Electric, Optic and Acoustic Interactions in Dielec-
trics, John Wiley and Sons, New York (1979)
7.2 Neil W. Ashcroft, N. David Mermin, Solid State Physics, Saunders
College Publishing, Philadelphia (1988)
7.3 Charles Kittel, Introduction to Solid State Physics, Second Edition,
John Wiley and Sons, New York (1953)
7.4 Baltes, H., Paul, O., Korvink, J. G., Schneider, M., Bühler, J.,
Schneeberger, N., Jaeggi, D., Malcovati, P., Hornung, M., Häberli,
A., von Arx, M. and Funk, J., IC MEMS Microtransducers, (Invited
Review), IEDM Technical Digest (1996) 521–524

324 Semiconductors for Micro and Nanosystem Technology