Page 269 - The Mechatronics Handbook

13

Modeling and

Simulation for MEMS

13.1 Introduction
13.2 The Digital Circuit Development Process:
Modeling and Simulating Systems with
Micro- (or Nano-) Scale Feature Sizes
13.3 Analog and Mixed-Signal Circuit Development:
Modeling and Simulating Systems with Micro-
(or Nano-) Scale Feature Sizes and Mixed Digital
(Discrete) and Analog (Continuous) Input,
Output, and Signals
13.4 Basic Techniques and Available Tools for
MEMS Modeling and Simulation
Basic Modeling and Simulation Techniques • A Catalog
of Resources for MEMS Modeling and Simulation
13.5 Modeling and Simulating MEMS, i.e., Systems
with Micro- (or Nano-) Scale Feature Sizes,
Mixed Digital (Discrete) and Analog
(Continuous) Input, Output, and Signals,
Two- and Three-Dimensional Phenomena,
and Inclusion and Interaction of Multiple
Domains and Technologies
13.6 A “Recipe” for Successful MEMS Simulation
Carla Purdy 13.7 Conclusion: Continuing Progress in MEMS
University of Cincinnati Modeling and Simulation

13.1 Introduction
Accurate modeling and efficient simulation, in support of greatly reduced development cycle time and
cost, are well established techniques in the miniaturized world of integrated circuits (ICs). Simulation
accuracies of 5% or less for parameters of interest are achieved fairly regularly [1], although even much
less accurate simulations (25–30%, e.g.) can still be used to obtain valuable information [2]. In the IC
world, simulation can be used to predict the performance of a design, to analyze an already existing
component, or to support automated synthesis of a design. Eventually, MEMS simulation environments
should also be capable of these three modes of operation. The MEMS developer is, of course, most
interested in quick access to particular techniques and tools to support the system currently under
development. In the long run, however, consistently achieving acceptably accurate MEMS simulations will
depend both on the ability of the CAD (computer-aided design) community to develop robust, efficient,
user-friendly tools which will be widely available both to cutting-edge researchers and to production
engineers and on the existence of readily accessible standardized processes. In this chapter we focus on
fundamental approaches which will eventually lead to successful MEMS simulations becoming routine.

©2002 CRC Press LLC