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                         The matrices of coefficients are A, B, and H. The smooth mapping fields of the nonlinear model are
                       denoted as F z (⋅), B p (⋅), and H(⋅).
                         It should be emphasized that the control is bounded. For example, using the IC duty ratio d D  as the
                       control signal, we have 0  ≤  d D   ≤ 1 or  −1  ≤  d D   ≤  +1. Four-quadrant ICs are used due to superior
                       performance, and −1 ≤ d D  ≤ +1. Hence, we have −1 ≤ u ≤ +1. However, in general, u min  ≤ u ≤ u max .

                       Proportional-Integral-Derivative Control
                       Many MEMS can be controlled by the proportional-integral-derivative (PID) controllers, which, taking
                       note of control bounds, are given as [9]

                                                   de
                                          min ∫
                                ut() =  sat u u max   e, et, ----- 
                                                d
                                                   dt
                                              ς  -------------  σ  -------------  α  2j+1
                                                              2j+1
                                                  2j+1
                                         u  ∑    2β+1  + ∑  ∫  2µ+1 dt + ∑  2γ+1
                                                                          -------------
                                     =  sat u   k pj e   k ij e       k dj e ˙   ,  u min ≤  ≤
                                          max
                                          min   j=0   j=0           j=0             uu max
                                              proportional   integral  derivative  
                       where k pj , k ij ,   and k dj  are the matrices of the proportional, integral, and derivative feedback gains; ς, β, σ,
                       µ, α, and γ are the nonnegative integers.
                         In the nonlinear PID controllers, the tracking error is used. In particular,
                                                    et() =   rt()   – yt()
                                                          reference/command  output
                         Linear bounded controllers can be straightforwardly designed. For example, letting ς = β = σ = µ = 0,
                       we have the following linear PI control law:

                                                                      ∫
                                                ut() =  sat u u max  k p0 et() +  k i0 et t  
                                                                         d
                                                          min
                         The PID controllers with the state feedback extension can be synthesized as

                                  u
                         ut() =  sat u ( e, x)
                                   max
                                   min
                                                                                   
                                       ς  -------------  σ  -------------  α  2j+1  
                                           2j+1
                                                      2j+1
                                                                               (
                                                                             ∂Ve, x)
                                  u  ∑ k pj e 2β+1  + ∑  ∫  2µ+1  ∑  -------------  +  Gt()B--------------------- 
                                                                   2γ +1
                              =  sat u           k ij e  dt +  k dj e ˙             ,  u min ≤  uu max
                                                                                              ≤
                                   max
                                   min   j=0   j=0          j=0               ∂  e  
                                                                               x   
                                       proportional  integral  derivative          
                       where V(e, x) is the function that satisfies the general requirements imposed on the Lyapunov pair [9],
                       e.g., the sufficient conditions for stability are used.
                         It is evident that nonlinear feedback mappings result, and the nonquadratic function V(e, x) can be
                       synthesized and used to obtain the control algorithm and feedback gains.
                       Tracking Control
                       Tracking control is designed for the augmented systems, which are modeled using the state variables and
                       the reference dynamics. In particular, from
                                                         ref
                                        x ˙ t() =  Ax +  Bu,  x ˙ () =  rt() yt() =  rt() Hx t()
                                                                  –
                                                                              –
                                                           t
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