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                         The time-varying nonlinear switching surface is υ(t, x, e) = K υxe (t, x, e) = 0. The soft-switching control
                       law is given as
                                             ut, x, e) =  – Gφυ(),  – 1 ≤  u ≤ 1, G >  0
                                              (

                       where φ(⋅) is the continuous real-analytic function of class C (  ≥ 1), for example, tanh and erf.
                       Constrained Control of Nonlinear MEMS: Hamilton–Jacobi Method
                       Constrained optimization of MEMS is a topic of great practical interest. Using the Hamilton–Jacobi theory,
                       the bounded controllers can be synthesized for continuous-time systems modeled as

                                         MEMS       MEMS      MEMS  2w+1         MEMS
                                                            (
                                                  (
                                        x ˙  t () =  F s x  ) +  B s x  )u  ,  y =  Hx
                                                  u min ≤ u ≤  u max ,  x MEMS ()  x 0 MEMS
                                                                     t 0 =
                         Here, x MEMS  ∈ X s  is the state vector; u ∈ U is the vector of control inputs: y ∈ Y is the measured output;
                       F s (⋅), B s (⋅) and H(⋅) are the smooth mappings; F s (0) = 0, B s (0) = 0, and H(0) = 0; and w is the nonnegative
                       integer.
                         To design the tracking controller, we augment the MEMS dynamics
                                        MEMS        MEMS      MEMS  2w+1         MEMS
                                                            (
                                                                               (
                                                  (
                                       x ˙  t () =  F s x  ) +  B s x  )u  y =  H x  )

                                                u min ≤ u ≤  u max ,  x  MEMS ()  x 0 MEMS
                                                                    t 0 =
                                               ref
                       with the exogenous dynamics  x ˙ () =  Nr y =  Nr H x MEMS ).
                                                                   (
                                                                –
                                                        –
                                                 t
                         Using the augmented state vector
                                                             MEMS
                                                            x
                                                       x =        ∈  X
                                                             x  ref
                       one obtains
                                                                                       x MEMS
                                x ˙ t() =  Fx, r) +  Bx()u  2w+1 ,  u min ≤ u ≤  u max ,  xt 0 =  x 0 ,  x =
                                        (
                                                                        ()
                                                                                        x ref
                                                 F s x(  MEMS )              B s x  MEMS )
                                                                               (
                                        (
                                       Fx, r) =            +  0  r,  Bx() =
                                                   (
                                                – H x MEMS )  N                 0
                         The set of admissible control U consists of the Lebesgue measurable function u(⋅), and a bounded
                       controller should be designed within the constrained control set
                                           U =  { u ∈    u imin ≤  u i ≤  u imax , i =  1,…,m}.
                                                     m
                         We map the control bounds imposed by a bounded, integrable, one-to-one, globally Lipschitz, vector-

                       valued continuous function Φ ∈C (  ≥ 1). Our goal is to analytically design the bounded admissible state-
                       feedback controller in the closed form as u = Φ(x). The most common Φ are the algebraic and transcen-
                       dental (exponential, hyperbolic, logarithmic, trigonometric) continuously differentiable, integrable, one-
                       to-one functions. For example, the odd one-to-one integrable function tanh with domain (−∞, +∞) maps
                                                                                  −1
                       the control bounds. This function has the corresponding inverse function tanh  with range (−∞, +∞).
                         The performance cost to be minimized is given as

                                                                       ∫
                                                                               T
                                                                                  –
                                                                                  1
                                                                                        2w
                             J =  ∫ ∞ [ W x x() +  W u u()] t =  ∫ ∞  W x x() + ( 2w +  1) ( Φ ()) G diag u ) u d t
                                                                                      (
                                                                           1
                                                                          –
                                                 d
                                                                                           d
                                                                             u
                                 t  0                 t 0
                             −1
                       where G  ∈  m×m  is the positive-definite diagonal matrix.
                       ©2002 CRC Press LLC
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