Page 90 - The Mechatronics Handbook

13 Modeling and Simulation for MEMS Carla Purdy
Introduction • The Digital Circuit Development Process: Modeling and Simulating
Systems with Micro- (or Nano-) Scale Feature Sizes • Analog and Mixed-Signal
Circuit Development: Modeling and Simulating Systems with Micro- (or Nano-) Scale
Feature Sizes and Mixed Digital (Discrete) and Analog (Continuous) Input, Output,
and Signals • Basic Techniques and Available Tools for MEMS Modeling and
Simulation • Modeling and Simulating MEMS, i.e., Systems with Micro- (or Nano-)
Scale Feature Sizes, Mixed Digital (Discrete) and Analog (Continuous) Input, Output,
and Signals, Two- and Three-Dimensional Phenomena, and Inclusion and Interaction
of Multiple Domains and Technologies • A “Recipe” for Successful MEMS Simulation •
Conclusion: Continuing Progress in MEMS Modeling and Simulation
14 Rotational and Translational Microelectromechanical Systems: MEMS
Synthesis, Microfabrication, Analysis, and Optimization
Sergey Edward Lyshevski
Introduction • MEMS Motion Microdevice Classifier and Structural Synthesis • MEMS
Fabrication • MEMS Electromagnetic Fundamentals and Modeling • MEMS Mathematical
Models • Control of MEMS • Conclusions
15 The Physical Basis of Analogies in Physical System Models Neville Hogan
and Peter C. Breedveld
Introduction • History • The Force-Current Analogy: Across and Through Variables •
Maxwell’s Force-Voltage Analogy: Effort and Flow Variables • A Thermodynamic Basis for
Analogies • Graphical Representations • Concluding Remarks

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