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3 Tunable Excirner Lasers   41

                     2.2  Rare Gas Excjmer Lasers

                         The  IC: -12;  transitions in the noble gases (Ar,,  Kr,,  Xe,)  provide VUV
                     laser radiation. They all exhibit continuum emission.-The low stimulated emis-
                     sion  cross  sections and  short lifetimes  of  the  upper  states require high  pump
                     rates. which necessitates an electron beam generator as a pumping source. The
                     expense  and  cumbersome  nature  of  such  systems have  unfortunately  limited
                     their  availability to  relatively few  laboratories. Despite the  dearth  of  low-loss
                     and damage-resistant optical materials in the VUV, there has been considerable
                     progress in line narrowing and tunability of these three laser media. The perfor-
                     mance of these lasers is listed in Table 4.


                     3.  TUNING OF  DISCHARGE AN5 ELECTRON BEAM
                     PUMPED EXCIMER LASERS

                         The avalanche discharge excimer laser is the most common format that is
                     readily  available to  the  researcher. These  devices are  relatively  compact  and
                     occupy a fraction of the space of an optical table. In terms of frequency tunabil-
                     ity. they  can potentially  access the full bandwidth of  the excimer laser transi-
                     tions, which, as we  have seen in the previous sections, vary  from molecule to
                     molecule. For a typicall  homogeneously broadened single broadband transition
                     the full-width half-maximum bandwidth is of the order of 200 cm-1.
                         Typically a narrowband tunable oscillator is developed that is then amplified
                     in  single-pass. multiple-pass, or regenerative amplifier configurations to obtain
                     high powers (Fig. 4),  Often the amplifier may be an electron beam pumped or
                     electron  beam  sustained discharge laser. These  lasers  are  generally  low-gain,
                     large-volume devices with  temporal gain times  of  a factor of  10 to  20  longer
                     than the commercially available avalanche dischxge lasers.






                     TABLE 4  Performance of Rare Gas Excimer Lasersa

                            Wavelength    Linewidth                  output
                     Laser     (nm)         (nmJ     Tuning elements   poiier t MW)   Reference

                     Ar2*   124.5-127.5      0.3     Prism            2         [57]
                             123.2-1 27.4    0.6      Grating        0.001      tjgl
                               126                                    16        [W
                     Kr,'      115.7         0.8                                [6@1
                     xe2-     170-175       0.13     Prism            0.7       t611

                     JAdapted from Hooker and Webb [56]
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