Page 98 - An Introduction to Microelectromechanical Systems Engineering

Summary 77

Selected Bibliography

Chang, C. Y., and S. M. Sze (eds.), ULSI Technology, New York: McGraw-Hill, 1996.
Flamm, D. L., and G. K. Herb, “Plasma Etching Technology,” in Plasma Etching: An
Introduction, D. M. Manos and D. L. Flamm (eds.), San Diego, CA: Academic Press, 1989,
pp. 1–89.
Jaeger, R. C., Introduction to Microelectronic Fabrication, Reading, MA: Addison-Wesley,
1988.
Kamins, T., Polycrystalline Silicon for Integrated Circuits, Boston, MA: Kluwer Academic
Publishers, 1988.
Kovacs, G. T. A., Micromachined Transducers Sourcebook, New York: McGraw-Hill,
1998.
Madou, M., Fundamentals of Microfabrication, Boca Raton, FL: CRC Press, 1997.
Moreau, M., Semiconductor Lithography Principles, Practices and Materials, New York:
Plenum Press, 1988.
Tong, Q.–Y., and U. Gösele, Semiconductor Wafer Bonding, New York: Wiley, 1999.
Wise, K. D. (ed.), “Special Issue on Integrated Sensors, Microactuators, and Microsystems
(MEMS),” Proceedings of the IEEE, Vol. 86, No. 8, August 1998.