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              Auger Electron Spectroscopy                                                                 789

                                                                dependentonsuchfactorsastracecontamination,thecrys-
                                                                tallography of the surface, the roughness of the surface,
                                                                and the presence of other alloying elements in the solid
                                                                that is being analyzed. Although one can obtain accurate
                                                                calibration for a particular system, it is very difficult to
                                                                apply a given calibration to a variety of alloys on a rou-
                                                                tine analytical basis. Consequently, many researchers fre-
                                                                quently rely on relative changes in a normalized signal to
                                                                discuss changes in the surface composition. For example,
                                                                in the differentiated spectrum shown in Fig. 2, which was
                                                                taken from a steel fracture surface, one might choose the
                                                                strong iron peak at 703 eV and normalize all other peaks
                                                                by it. Then, one could discuss changes in normalized peak
              FIGURE 2 Typical differentiated Auger spectra taken from steels.
                                                                height ratios to describe changes in the composition of this
              The upper spectrum was from a nonembrittled (N.E.) steel, and
              the fracture surface that was analyzed was transgranular. The  surface.
              lower spectrum was from an embrittled steel, and the fracture  The previous paragraphs give a brief introduction of
              surface that was analyzed was intergranular. [From Stein, D. F.,  the Auger process and the basic way in which surfaces
              Joshi, A., and LaForce, R. P. (1969). ASM Trans. Q. 62, 776.]
                                                                are analyzed with it. However, the great power of Auger
                                                                electron spectroscopy has been broad in its applicability.
                                                                We now wish to discuss these applications in the field of
              Tracy. This analyzer provided a much higher signal-to-
                                                                materials science.
              noise ratio and also allowed for much faster acquisition
              of data. It is the analyzer on which most modern sys-
              tems are based. Another important improvement was in  III. APPLICATIONS IN
              vacuum systems. When the early work was performed,   MATERIALS SCIENCE
              it was almost impossible to obtain a clean surface. The
              vacuums were poor enough so that carbon and oxygen  Auger electron spectroscopy has become one of the most
              were adsorbed rapidly onto the surface. For a technique  important tools for the investigation of interfaces in the
              that only probes the top two to five atom layers, as does  field of materials science. In fact, it is probably safe to say
              Auger electron spectroscopy, this adsorption presented a  that it has found its most widespread application in this
              problem. With the development of ions pumps and tur-  field. Because it does not give detailed chemical bonding
              bomolecular pumps that provide a background pressure  information about the species on a surface, other tech-
              of less than 1 × 10 −10  Torr, a clean surface could be pre-  niques such as XPS and UV photoemission are more com-
              pared routinely, either through fracture or by sputtering  monly used for detailed chemical investigations. However,
              with rare gas ions, and kept in this condition for 5 to 10 h.  in materials science applications the need is more often to
              Finally, new and much brighter filaments were developed  detect the presence of elements on the surface of the solid,
              that allowed a stronger Auger signal to be generated. In  and for this application Auger electron spectroscopy is the
              particular, the development of the lanthanum hexaboride  preferred technique.
              filament, which replaced the standard thermionic tung-  The types of studies that have been performed can be
              sten filament, offered a great increase in filament current.  divided into two categories. One set is concerned with
              This increase also meant that smaller areas (<1 µmin  studies of the external surface. Segregation to the surface
              diameter) on the surface could be analyzed, and it led to  can cause its composition to be very different from that of
              the development of the scanning Auger spectrometer. In  the bulk. There has been great interest in understanding
              this spectrometer, the Auger beam is first used to form  how this difference in composition can affect such pro-
              a secondary electron image of the surface that is being  cesses as catalysis, corrosion, and oxidation. Also, one can
              analyzed. The beam can then be placed on one particular  use the kinetics of segregation to the surface to determine
              area to obtain a spectrum from that spot. In the most re-  the diffusion coefficient of an element in the solid. The
              cent machines, field emission filaments are used that allow  other type of study is concerned with internal interfaces,
              analysis of a spot size of under 20 A.            such as grain boundaries and particle–matrix interfaces.
                One problem with Auger electron spectroscopy is the  The composition of these interfaces can also be quite dif-
              difficulty of converting the signal to accurate values of  ferent from that of the bulk, as a result of segregation,
              atomic percent. The reason for this difficulty is that be-  and consequently, they can control various metallurgical
              cause the Auger signal is so surface sensitive, it is very  properties.
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