Page 46 - High Power Laser Handbook
P. 46

Excimer Lasers    19





                                         351 nm
                                     XeF




                                     XeCl  308 nm




                                     XeBr  282 nm


                                         248 nm
                                     KrF




                                     KrCl  223 nm


                                         193 nm
                                     ArF


                                         176 nm
                                     Xe 2


                                         157 nm Excimer Gas Media and Emission Wavelengths

                                     F 2

                                         126 nm
                                     Ar 2


                                         116 nm  Table 2.1
                                     H 2







          18
   41   42   43   44   45   46   47   48   49   50   51