Excimer Lasers 19 351 nm XeF XeCl 308 nm XeBr 282 nm 248 nm KrF KrCl 223 nm 193 nm ArF 176 nm Xe 2 157 nm Excimer Gas Media and Emission Wavelengths F 2 126 nm Ar 2 116 nm Table 2.1 H 2 18