Page 201 - Inorganic Mass Spectrometry - Fundamentals and Applications

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ur Example of positive and negative secondary ion mass spectrometer (SIMS)
mass spectra. An l60- primary beam of l nA at 15 keV was used for these spectra of 34'7
and 304 stainless steels. (a) Positive ion spectrum 347 stainless steel; and (b) negative ion
spectrum 304 stainless steel. (From Ref. 84.)