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304                    6. Interconnection with Optics

                                      Table 6.1
             Advantages of Polymers as Compared to Common Inorganic Photonic Materials
                                        Polymer
        Features                        based         GaAs         LiNbO,,

        Channel waveguide              Yes          Yes          Yes
        Waveguide propagation loss     <0.1dB/cm    0.2-0.5 dB/cm  < 0.1 dB/cm
        OEIC size                      Unlimited    Limited      Limited
        Channel waveguide packaging density  Up to 1250  500     333
         (channels/cm)
        Implementation on other substrates  Easy    Difficult    Difficult
        Fabrication cost               Low          High         High




        distances of tens of centimeters. Transparency at the operating wavelength,
        thermal and mechanical stability, and compatibility with Si-CMOS processes
        are the main requirements for a given polymeric material to be successfully
        used in optoelectronic devices. Table 6.2 lists the optical properties of some of
        the materials investigated in our laboratories, including photolime gel, com-
        mercially available polyimides, and BCB (Cyclotenes). These polymers have
        great potential for optical waveguide applications in optoelectronic devices due
        to their favorable properties such as Si-CMOS process compatibility, planar-
        ization, and patternability. Although photolime gel has a relatively low glass
        transition temperature (~ 160°C), it is a very good test polymer due to its low
        cost and ease of handling. Moreover, it forms a graded index waveguide
        structure, and therefore waveguides can be formed on any suitable substrate.



                                      Table 6.2
            Optical Properties of Photolime Gel, Ultradel Polyimides (Amoco Chemicals), and
                               Cyclotenes (DOW Chemicals)

                            Refractive index («) («   Optical loss dB/cm (a.
        Material         633 nm  850 nm   IJOOnm   633 nm  850 nm   UOOnm

        Photolime gel     1.54                       0.3    0.3
        Ultradel 9020     1.55             1.523     1.29    0.34    0.43
        Ultradel 9021                      1.536     1.04   0.13     0.34
        Ultradel 7501     1.58             1.554     1.57            0.38
       Ultradel 4212      1.61                      21.1     3.24    0.38
       Ultradel 1608      1.71    1.68     1.667     9.57    2.16    0.37
       Cyclotene502I      1.56
       Cyclotene 3022     1.558   1.55     1.54
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