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6.3. Thin-Film Waveguide Couplers


                                                MEASURED
                                                LEAST-MEAN
                             0.2t dB/em         SOUARtS FIT
                     o 10
                    a
                                                              8500 A
                    •o
                     HI
                     I
                     510'
                    jio 3     0.58 dB/cm
                    5                                         6328 A
                    tc



                                                        20
                               Propagation Length (mm)
       Fig. 6.12. Scattered power versus the propagation length for a measured waveguide with TE r
       mode launching at the wavelength of (a) 850 nm, (b) 632.8 nm.



       ameters, such as tooth height, tooth width, and tilted angle, before starting any
       manufacturing work. We have developed a new analytical method to simulate
       the planarized tilted grating for waveguide coupling.
          The phenomenon of grating-coupled radiation is widely used in guided-
       wave optical interconnects. Very often coupling in a specific direction is
       required. To achieve this unidirectional coupling, the tilted grating profile can
       be used. Coupling efficiency can then be evaluated. A very important aspect of
       manufacturing such couplers is the tolerance interval of the profile parameters,
       such as tooth height, width, tilted angle, and so on. Gratings with very tight
       intervals would be very difficult to manufacture and are practically useless.
       Problem of gratings design have been described in many publications [16].
       However, described numerical methods work well only when the grating
       profile is relatively shallow, and fail when grating becomes deep. Thus, new
       analytical methods which provide high numerical accuracy were developed.
       Grating couplers with tilted parallelogram profiles demonstrate, as will be
       shown below, very high coupling efficiency in certain directions.


          6.3.1.1. Theoretical Formulation
          Consider the grating structure shown in Fig. 6.13. For simplicity, we derive
       the equation for the TE mode; however, in the case of TM mode, the resulting
       equation is similar. A transverse electric (TE) mode guided E field is along the
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