Page 14 - Sami Franssila Introduction to Microfabrication

Contents xiii

PART VIII: FUTURE 361

38 Moore’s Law 363
38.1 From transistor to integrated circuit 363
38.2 Moore’s law 364
38.3 Extending optical lithography: phase-shift masks (PSM) 366
38.4 Alternatives to optical lithography 368
38.5 Fundamental and practical limits 369
38.6 IC industry 371
38.7 Exercises 372
References and related readings 372

39 Microfabrication at Large 373
39.1 New materials 373
39.2 High aspect ratio structures 374
39.3 Tools of microfabrication 375
39.4 Bonding and layer transfer 376
39.5 Devices 376
39.6 Microfabrication industries 378
39.7 Exercises 379
References and related readings 380

Appendix A: Comments and Hints to Selected Problems 381

Appendix B: Constants and Conversion Factors 387

Index 391