Page 280 - MEMS Mechanical Sensors
P. 280
Index 269
defined, 67 isotropic, 22
electrical interconnects, 68–70 See also Etching
protective coatings, 69 Wind receptor hair flow sensor, 234
sealing, 68 Wire bonding, 60–61
Wavelength, 96
Wet etching, 21 Y
anisotropic, 22–27
Yokogawa differential resonant pressure
sensor, 141
