Page 275 - MEMS Mechanical Sensors

264 Index

Materials, 7–11 resonant, 139–42
additive, 11 techniques, 142–43
gauge factors, 88 MEMS Xplorer, 55–56
piezoelectric, 91–92 defined, 55
substrates, 7–11 illustrated, 56
Matlab, 40–42 See also Finite element simulation tools
Mechanical decoupling, 74–75 MemTrans, 47
defined, 74 Metal(s)
economics benefits, 75 deposition, 17
V-grooves, 74 foil strain gauge, 85, 88
Mechanical transducers, 3–4 packages, 59
Mechanical transduction techniques, 85–112 Microchannels, 215, 216
capacitive, 92–94 Microchemical reaction system, 215
optical, 94–97 Microelectromechanical systems. See MEMS
piezoelectricity, 89–92 Micro flow sensors, 214–17
piezoresistivity, 85–89 Micromachined accelerometers.
resonant, 97–104 See Accelerometers
Medium deflection diaphragms, 127 Micromachined gyroscopes. See Gyroscopes
MEMaterial, 48 Micromachined sensor head, 163
Membrane analysis, 127–28 Micromachined silicon diaphragms, 130–32
MemCap, 45 anisotropically etched, 131
MemDamping, 46 damping and, 132
MemETherm, 46 dynamics, 131
MemHenry, 46 Micromachining
MemMech, 45 defined, 22
MemPZR, 46 surface, 28–29
MEMS Microphones, 143–44
defined, 2–3 capacitive, 143–44
devices, 3 condenser, 144
fabrication process, 5 defined, 143
fabrication techniques, 11–36 electret, 144
market, 3 piezoelectric, 144
materials, 7–11 piezoresistive, 144
simulation/design tools, 39–56 Microsystems technology (MST), 2–3
MEMS mechanical sensors, 10 MOS transistors, 143
additive materials, 11 Motivation, this book, 1–2
environment protection from, 71 Multiaxial strain transducer, 167
mechanical isolation of chips, 71–80 Multiaxis accelerometers, 188–91
packaging, 66–80 defined, 188–89
protection from environmental effects, with modified piezoresistive pick-off, 191
67–70 pick-off circuit, 190
quartz in, 10 sensing element, 189
See also specific types of sensors with single proof mass, 191
MEMS Pro, 54–55 three-axis, 189, 190
defined, 54 three wafers, 190
Suite illustration, 55 See also Accelerometers
Verification Suite, 54
See also Finite element simulation tools N
MEMS technology pressure sensors, 130–43
Near-field scanning optical microscopy
capacitive, 137–39 (NSOM), 166
micromachined silicon diaphragms, 130–32 Nonlinear effects, 102–4
piezoresistive, 132–37
hard, 103