Page 270 - MEMS Mechanical Sensors

Index

3-D Builder, 50 triple-hot-wire schematic, 249
See also Thermal flow sensors
A Aneroid barometers, 122
AnisE, 50
Absolute pressure sensors, 121
Accelerometers, 68, 175–95 Anisotropic etching
dry, 27–28
applications, 174
wet, 22–27
capacitive, 178, 182–85
capped at wafer level, 68 See also Isotropic etching
closed loop, 177–80 Anodic bonding, 30–31
defined, 30
commercial, 192–95
process, 30
companies and, 196–97
dynamic performance, 176 setup, 31
See also Wafer bonding
layout, 45 ANSYS, 50–54
lumped parameter model, 175 example MEMS applications and, 51
mechanical sensing element, 175–76
multiaxis, 188–91 MEMS capability, 50
open loop, 176–77 Multiphysics software, 50–51
piezoelectric, 185–86 routine illustration, 52
simulations, 51
piezoresistive, 181–82
structural analysis, 54
principle of operation, 175–80
research prototype, 180–92 See also Simulation tools
resonant, 187–88 Atmospheric pressure, 115
Atmospheric pressure CVD (APCVD), 13
tunneling, 186–87
Atomic force microscope (AFM), 164–66
See also Inertial sensors
Actuators, 3 Audience, this book, 5
Additive materials, 11 Automatic gain control (AGC) control loop,
200
Adhesive bonding, 31–32, 63
AutoSpring, 46
Amorphous silicon, 5
deposition, 13
LPCVD, 13 B
piezoresistive, 88 Behavioral modeling simulation tools, 40–43
Analog force-feedback, 177–79 Matlab, 40–42
capacitive accelerometers in, 178 Saber, 43
illustrated, 180 Simulink, 40–42
See also Closed loop accelerometers Spice, 42–43
Anemometers, 219–20 VisSim, 43
data, 221 See also Simulation tools
hot wire, 219 Bonding, 29–32
measurement curve, 220, 221 adhesive, 31–32
operation, 219 anodic, 30–31
schematics, 220 eutectic, 31

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