Page 274 - MEMS Mechanical Sensors

Index 263

defined, 18 K
fabrication using, 19 KOH etching, 22
See also Lithography
Gyroscopes, 195–206 L
applications, 174
commercial, 204–6 Levitation, 206–7
double-axis, 203–4 Lift force flow sensors, 235–36
dual-axis, 203–4 data, 236
macroscopic mechanical, 197 defined, 235
principle of operation, 195–99 measurement curves, 236
research prototypes, 199–204 schematic, 236
single-axis, 199–203 See also Force transfer flow sensors
surface-machined, 200 Liftoff process, 20
surface-micromachined, 201 example, 20
two-gimbal structure, 199 process flow for, 20
vibrating ring structure, 202 LIGA process, 34
vibratory rate, 198 Linearity
See also Inertial sensors baselines, 118
independent, 118
H terminal-based, 118
zero-based, 118
Hydraulic force multiplication, 116 See also Pressure sensors
Hysteresis, 118–19
Linear variable differential transformer
defined, 118 (LVDT), 130
illustrated, 119
Lithography, 17–21
defined, 17
I double-sided, 18
Inductive coupling, 143 grayscale, 18–19
Inertial sensors, 173–207 illustrated, 12
defined, 173 liftoff process, 20
future, 206–7 photoresists, 19
introduction, 173–75 resist, 17
micromachined accelerometers, 175–95 topography, 20–21
micromachined gyroscopes, 195–206 See also Fabrication
research, 174 Load cells, 156, 157
InertiaMM, 47 defined, 156
IntelliFab, 49 distributed capacitive, 162
IntelliSuite, 48–50 principle based on compression of silicon,
3-D Builder, 50 157
AnisE, 50 Long-term drift, 119
defined, 48 Low-pressure CVD (LPCVD), 13
electromechanical solver, 49–50 amorphous silicon, 13
electrostatic solver, 49 polysilicon, 13
IntelliFab, 49 silicon nitride, 15
MEMaterial, 48M microfluidic analysis See also Chemical vapor deposition (CVD)
module, 50
See also Finite element simulation tools M
Intensity, 94–95
Interdigital (IDT) electrodes, 142 Magnetic field resistors (MAGRES), 163
Manometers, 121–22
Isotropic etching defined, 121
dry, 27
wet, 22 U-tube, 121, 122
See also Anisotropic etching Martian pressure sensor, 79