Page 277 - MEMS Mechanical Sensors

266 Index

Pressure(s) R
atmospheric, 115 Radial stress, 126, 127
capacitance vs., 138 Research prototype accelerometers, 180–92
direction, 114
capacitive, 182–85
dynamic, 116 classification, 180
in static fluid, 114 multiaxis, 188–91
on submerged block, 115 piezoelectric, 185–86
units, 115
piezoresistive, 181–82
volume vs., 117 resonant, 187–88
Pressure sensing die, 72 tunneling, 186–87
Pressure sensors, 113–45 See also Accelerometers
absolute, 121
Research prototype gyroscopes, 199–204
aneroid barometers, 122 double-axis, 103–4
Bourdon tubes, 122–23 single-axis, 199–203
capacitive, 137–39 See also Gyroscopes
diaphragm-based, 123–30
Resist
differential, 121 defined, 17
dynamic, 120–21 negative, 17
gauge, 121 positive, 17
hysteresis, 118–19
profiles, 21
introduction, 113–14
Resistors, thick-film, 89
linearity, 118 Resonant accelerometers, 187–88
long-term drift, 119 bulk/surface micromachining, 188
manometers, 121–22 defined, 187–88
Martian, 79
high resonant frequency, 188
MEMS technology, 130–43 See also Accelerometers
microphones, 143–44 Resonant pressure sensors, 139–42
mounting of, 79 defined, 139
optical techniques, 142
Druck, 140
physics of, 114–21 quartz, 141–42
piezoresistive, 132–37 Yokogawa differential, 141
resonant, 139–42 See also Pressure sensors
sensitivity, 119
Resonant sensors, 97–98
specifications, 117–19 block diagram, 98
temperature effects, 119 performance features, 97
traditional, 121–23 Resonant techniques, 97–104
types of, 121
resonator design characteristics, 99–104
vacuum, 123 vibration excitation and detection
zero/offset, 117 mechanisms, 98–99
Printed circuit boards (PCBs), 242
See also Mechanical transduction
techniques
Q Resonators
Q-factor, 99–102 coupling, 98
calculation, 100 defined, 97
defined, 99 design characteristics, 99–104
high, 99–100 metallic, 157
limitation, 100, 102 nonlinear behavior and hysteresis, 102–4
Quartz, 10 Q-factor, 99–102
properties, 10 SAW, 142–43, 159
for resonant applications, 141