Page 278 - MEMS Mechanical Sensors

Index 267

S Simulation tools, 39–56
ANSYS, 50–54
Saber, 43
Scanning force microscope (SFM), 164 approaches, 39–40
Scanning hall probe microscope (SHPM), behavioral modeling, 40–43
CoventorWare, 44–47
164–65
Screen printing, 32–33 finite element analysis (FEA), 43–56
defined, 32 finite element modeling (FEM), 39–40
process, 33 IntelliSuite, 48–50
Matlab, 40–42
thick-film, 32–33
Sealing techniques, 65–66 MEMS Pro/MEMS Xplorer, 54–56
brazing, 65 Saber, 43
processes, 65 Simulink, 40–42
Spice, 42–43
soldering, 65
welding, 65 system level modeling, 39
See also Packaging VisSim, 43
Second order packaging, 67 Simulink, 40–42
defined, 40
defined, 67
displacing sensor from, 75–77 sensing element model, 40
See also Packaging sensor system model, 41
Sensitivity, 119 See also Behavioral modeling simulation
tools
Sensors, 3
Single-axis gyroscopes, 199–203
Silicon-based torque sensors, 154–57
Silicon dioxide, 15–17 Small deflection diaphragms, 125–27
properties, 16 Soft adhesives, 77–79
use of, 15 die mount with glass spacers, 78
mounting of pressure sensor, 79
Silicon fusion bonding, 29–30
Silicon nitride, 14–15 RTV silicone, 77
LPCVD, 15 SOI wafers, 8
PECVD, 15 bonded and etched (BESOI), 9
manufacturing processes, 9
properties, 15
protective films, 70 UNIBOND, 9
Silicon on insulator (SOI), 7 Soldering
layers, 9 die attach, 63
as sealing technique, 65
See also SOI wafers
Silicon oxide, protective films, 70 Solid Model tool, 45
Silicon (Si), 1, 7–10 Spatial position, 96
amorphous, 5 Spice, 42–43
defined, 42
crystalline, 4–5, 7–8
dominance, 7 illustrated use of, 43
doped, 17 See also Behavioral modeling simulation
epitaxial, 14 tools
SpringMM, 47
forms, 4–5
Static turbine flow meter, 238–39
needle, 76
polycrystalline, 5 data, 239
porous, 35 defined, 238
processing elements, 12 schematic, 239
See also Force transfer flow sensors
properties, 5
reasons for using, 4 Strain gauges
Young’s modulus of, 86 cantilever integrated, 155
SimMan, 46 metal foil, 85, 88
sensitivity, 86