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                    MEMS Packaging for Space Applications                           287


                    14. Lu, G.-Q., J. Calata, et al., Packaging of large-area, individually addressable, micro-
                       mirror arrays for the next generation space telescope. Design, Test, Integration, and
                       Packaging of MEMS/MOEMS 2002, May 6–8 2002, Cannes, France, 2002.



































































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