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Outlet
Valve
Parylene
diaphragm Nickel
Gap

(a) Paraffin Channel Inlet

Photodefinable glass substrate Heater

Circular Heater Reservoir Inlet
reservoir hole

(b)
200 µm
Channel
Paraffin Channel
actuator
500 µm

COLOR FIGURE 9.30 (a) Cross-section of paraffin active blocking valve actuator and (b) optical micrograph of a
nickel-plated microvalve from the backside (after Carlen and Mastrangelo (2002)).

+
Al V
−

(a) Silicon (d) Polyimide

Silicon

Polyimide
Al Top view
(b)
Silicon Polyimide

Polyimide
SAW
(c)
Silicon

COLOR FIGURE 9.34 SAW fabrication on electroactive polyimide (after Atkinson (2003)).

© 2006 by Taylor & Francis Group, LLC