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Platinum Zirconium oxide Silicon nitride
4 micron
typical

Silicon

Silicon dioxide
Not to scale
COLOR FIGURE 11.7 The structure of a microfabricated amperometric oxygen sensor and a picture of a sensor
packaged without its protective orifice.

(a)

Hydrocarbon Hydrogen
sensor Oxygen sensor
sensor

(b)

COLOR FIGURE 11.10 (a) Shuttle system hardware (H sensor with electronics); (b) A prototype version of a “Lick
2
and Stick” leak sensor system with hydrogen, hydrocarbon, and oxygen detection capabilities combined with power
and supporting electronics (including signal conditioning and telemetry).

© 2006 by Taylor & Francis Group, LLC