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Thermal oxide

Pyrex glass

(a)

The holes made by DRIE
for pressure measurements along the microchannel

Tap1: 260 µm
Tap3:
3350 µm
Inlet
Main microchannel
using DRIE
Flow direction
Blocked in these
experiments

Outlet: Tap2: 1670 µm
5020 µm
(b)
COLOR FIGURE 10.10 The schematics of (a) fabrication procedure and (b) photo of MC-II.

Pd-alloy Schottky
diode connectors

Pd-alloy resistor

2.2 mm

Pt heater Pt heater
connector connector
Pt temperature
detector
connector

COLOR FIGURE 11.1 Schematic diagram and picture of the silicon-based hydrogen sensor. The Pd alloy Schottky
diode (rectangular regions) resides symmetrically on either side of a Pt heater and temperature detector. The Pd alloy
Schottky diode is used for low-concentration measurements, whereas the resistor is included for high-concentration
measurements.

© 2006 by Taylor & Francis Group, LLC